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Reflow apparatus v1

Part list

Photoresist

MICROPOSIT S1818, positive-tone

Solvent

Propylene glycol methyl ether acetate (PGMEA)

Reflow apparatus Pasted image 20260221110657.png

We need very stable temperature control. Do we need a nitrogen environment? Probably not for the first pass.

  • 4" or 6" Glass dish
  • Hot plate

 250

 250

 250

  • Purchased 2084B2 on 2026-02-24

PTFE gasket Ultra-Chemical-Resistant PTFE Gasket Material, 6" x 6", 1/32" Thick | McMaster-Carr - 6" wide sheet - $10.88/pc - Cut with a razor blade - Chemically inert - [ ] Purchased 02/24/2026

M2 tap TiN Coated High-Speed Steel Tap, Plug Chamfer, M2 x 0.4 mm Thread Size, 7/16" Thread Length | McMaster-Carr - Cost: $27.02 each - [ ] Purchased 02/24/2026

Sample clips Pasted image 20260224111336.png

Drill bit TiN-Coated High-Speed Steel Drill Bit, 1.6mm Size | McMaster-Carr - $3.80/pc - 1.6 mm wide - [ ] Purchased 02/24/2026

Aluminum disc Easy-to-Machine MIC6 Cast Aluminum Disc, 6" Diameter | McMaster-Carr - ¼" thick - 6" wide - $24.51/pc - [ ] Purchased 02/24/2026

PGMEA - $200 for 4 liters or $80 for 1 liter - Arya says we already have 4 liters in the F bay for nanoscribe.

GDS We need a GDS file for the mirrors. For the first pass, we should make 3 mm diameter photoresist disks. We will cover them with flat mirrors.